JPS6036664A - 量産型グロー放電分解装置 - Google Patents

量産型グロー放電分解装置

Info

Publication number
JPS6036664A
JPS6036664A JP58178797A JP17879783A JPS6036664A JP S6036664 A JPS6036664 A JP S6036664A JP 58178797 A JP58178797 A JP 58178797A JP 17879783 A JP17879783 A JP 17879783A JP S6036664 A JPS6036664 A JP S6036664A
Authority
JP
Japan
Prior art keywords
gas
electrode plate
glow discharge
reaction chamber
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58178797A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0549751B2 (en]
Inventor
Takao Kawamura
河村　孝夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP58178797A priority Critical patent/JPS6036664A/ja
Publication of JPS6036664A publication Critical patent/JPS6036664A/ja
Publication of JPH0549751B2 publication Critical patent/JPH0549751B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Light Receiving Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP58178797A 1983-09-26 1983-09-26 量産型グロー放電分解装置 Granted JPS6036664A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58178797A JPS6036664A (ja) 1983-09-26 1983-09-26 量産型グロー放電分解装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58178797A JPS6036664A (ja) 1983-09-26 1983-09-26 量産型グロー放電分解装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58132488A Division JPS6024378A (ja) 1983-07-19 1983-07-19 量産型グロ−放電分解装置

Publications (2)

Publication Number Publication Date
JPS6036664A true JPS6036664A (ja) 1985-02-25
JPH0549751B2 JPH0549751B2 (en]) 1993-07-27

Family

ID=16054808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58178797A Granted JPS6036664A (ja) 1983-09-26 1983-09-26 量産型グロー放電分解装置

Country Status (1)

Country Link
JP (1) JPS6036664A (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61110768A (ja) * 1984-11-05 1986-05-29 Sharp Corp アモルフアスシリコン感光体製造用装置
JPS62164882A (ja) * 1986-01-14 1987-07-21 Canon Inc 堆積膜形成装置
WO2008018119A1 (fr) * 2006-08-08 2008-02-14 Life Technology Reserch Institute, INC. Appareil de dépôt de film

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57185971A (en) * 1981-05-11 1982-11-16 Oki Electric Ind Co Ltd Formation of glow discharge film
JPS5889943A (ja) * 1981-11-26 1983-05-28 Canon Inc プラズマｃｖｄ法
JPS58101735A (ja) * 1981-12-11 1983-06-17 Canon Inc プラズマｃｖｄ装置
JPS58132488A (ja) * 1982-01-28 1983-08-06 富士通フアナツク株式会社 工業用ロボツトのハンド交換方式

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57185971A (en) * 1981-05-11 1982-11-16 Oki Electric Ind Co Ltd Formation of glow discharge film
JPS5889943A (ja) * 1981-11-26 1983-05-28 Canon Inc プラズマｃｖｄ法
JPS58101735A (ja) * 1981-12-11 1983-06-17 Canon Inc プラズマｃｖｄ装置
JPS58132488A (ja) * 1982-01-28 1983-08-06 富士通フアナツク株式会社 工業用ロボツトのハンド交換方式

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61110768A (ja) * 1984-11-05 1986-05-29 Sharp Corp アモルフアスシリコン感光体製造用装置
JPS62164882A (ja) * 1986-01-14 1987-07-21 Canon Inc 堆積膜形成装置
WO2008018119A1 (fr) * 2006-08-08 2008-02-14 Life Technology Reserch Institute, INC. Appareil de dépôt de film
JP5068264B2 (ja) * 2006-08-08 2012-11-07 株式会社ライフ技術研究所 成膜装置

Also Published As

Publication number Publication date
JPH0549751B2 (en]) 1993-07-27

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